|
a. Chuck Table
|
- Vacuum hold-down for Wafer Mount with 4-, 6-, 8- , (optional)
12- wafers
|
|
|
b. Video Microscope
|
- Color Camera, independent subsystem with 120X or
greater integrated into Camera system 12.1" Color Flat Panel
Display
|
|
|
c. Machine Controls
|
- PC-based distributed control and machine vision
systems, solid state hard drives for reliability
|
|
|
c. Software
|
- Color Touch FPD Touch Screen, menu driven controls
- High Contrast Color Flat Panel Display of
street locations
- Password protection
- Log file for all wafers processed
- Self-diagnostic routines
- Programmable axis speeds
- Color FPD Touch Screen entry of command
and control functions with provisions for remote system supervision
- May be linked to any fab-compatible LAN
- Programmable from engineering station or
with download through 3˝ diskettes or direct communications over fab
LAN
|
|
d. Work Chucks
|
- Standard Dia.: 6" (150 mm), 8" (200 mm), 12" (300
mm) (optional)
|
|
|
e. Facilities
|
|
Vacuum
|
20 in Hg, minimum
|
|
|
Electrical
|
108-125 VAC, 50/60 Hz, 40 Amps, 208-225 VAC Optional
|
|
|
Air
|
80 psig ±
10 psig, <5 micron filtration, 70oF
±20oF
|
|
|
f. Movement & Accuracy
|
|
Y-Axis
|
Total Motion: >300 mm
|
|
|
Resolution: 0.05 um
|
|
|
Minimum Index: 0.25 um
|
|
|
Index Repeatability: 0.25 um
|
|
|
X-Axis
|
Total Motion: >300 mm
|
|
|
Resolution: 0.33 um
|
|
|
Minimum Index: 1.0 um
|
|
|
Index Repeatability: 1.5 um
|
|
|
Z-Axis
|
Resolution: 0.01 um
|
|
|
Minimum Index: 0.25 um
|
|
|
Index Repeatability: 0.01 um
|
|
|
Theta Axis Rotation
|
Manual or Auto: 340o± 2 arc-seconds
|
|
|
g. Physical
|
|
|
Size
|
36" (92 mm) wide X 32" (82 mm) deep X 24" (61 mm) high
|
|
|
Weight
|
750 Lbs (341 Kg) with (Patent 6,227,515) VMP filled and sealed w/water
|
|
 |
|
Additional notes: Color Flat Panel Displays are used for the touch program screen and video
display for very low ESD emissions in the environment. The FPD program interface
can be operated with clean room gloves.
|
|
