| a. Chuck Table
|
- Vacuum hold-down for Wafer Mount with 4-, 6-, 8- , (optional)
12- wafers
|
| b. Video Microscope |
- Color Camera, independent subsystem with 120X or greater
integrated into Camera system 12.1" Color Flat Panel Display
|
| c. Machine Controls |
- PC-based distributed control and machine vision systems,
solid state hard drives for reliability
|
| c. Software |
- Color Touch FPD Touch Screen, menu driven controls
- High Contrast Color Flat Panel Display of street locations
- Password protection
- Log file for all wafers processed
- Self-diagnostic routines
- Programmable axis speeds
- Color FPD Touch Screen entry of command and control
functions with provisions for remote system supervision
- May be linked to any fab-compatible LAN
- Programmable from engineering station or with download
through 3½ diskettes or direct communications over fab
LAN
|
| d. Work Chucks |
- Standard Dia.: 6" (150 mm), 8" (200 mm), 12" (300 mm)
(optional)
|
| e. Facilities |
| Vacuum
| 20 in Hg, minimum |
| Electrical |
108-125 VAC, 50/60 Hz, 40 Amps, 208-225 VAC
Optional |
| Air |
80 psig ± 10
psig, <5 micron filtration, 70oF ±20oF
|
| f. Movement & Accuracy
|
| Y-Axis |
Total Motion: >300 mm |
|
Resolution: 0.05 um |
|
Minimum Index: 0.25 um |
|
Index Repeatability: 0.25 um |
| X-Axis |
Total Motion: >300 mm |
|
Resolution: 0.33 um |
|
Minimum Index: 1.0 um |
|
Index Repeatability: 1.5 um |
| Z-Axis |
Resolution: 0.01 um |
|
Minimum Index: 0.25 um |
|
Index Repeatability: 0.01 um |
| Theta Axis Rotation |
Manual or Auto: 340o±
2 arc-seconds |
| g. Physical |
|
| Size |
36" (92 mm) wide X 32" (82 mm) deep X 24" (61
mm) high |
| Weight |
750 Lbs (341 Kg) with (Patent 6,227,515) VMP
filled and sealed w/water |
 |
| Additional notes: Color Flat Panel Displays
are used for the touch program screen and video display for
very low ESD emissions in the environment. The FPD program
interface can be operated with clean room gloves. |
